发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a minute semiconductor device which reduces coupling capacitance and can restrain leakage current. SOLUTION: This semiconductor device is constituted of an element-isolation insulating film 3b, which is formed into a protruding shape on the main face of a semiconductor substrate 1. In addition, the device is constituted of an active region on the main face of the semiconductor substrate 1, which is surrounded by the element-isolation insulating film 3b, a gate-electrode interconnection 9b which is formed on the element-isolation insulating film 3b, and a gate-electrode interconnection 9 which is formed on the active region via a gate insulating film 7. In this case, the height of the surface of the gate- electrode interconnection 9 is made substantially identical to that of the gate- electrode interconnection 9b by having their opposite areas reduced. Thereby, the coupling capacitance of the semiconductor device is reduced.
申请公布号 JP2000260882(A) 申请公布日期 2000.09.22
申请号 JP19990060717 申请日期 1999.03.08
申请人 TOSHIBA CORP 发明人 KANDA YASUO;SUZUKI HIDENORI
分类号 H01L21/28;H01L21/3205;H01L21/762;H01L21/8234;H01L21/8242;H01L23/52;H01L27/088;H01L27/108;H01L29/78 主分类号 H01L21/28
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