| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a roughening method of a silicon substrate surface for a solar battery, which improves the photoelectric conversion characteristic of the solar battery and can easily manufacture the battery at a low cost, and a polycrystalline silicon substrate manufactured by the method. SOLUTION: The surface of a silicon substrate for a solar battery is roughened by a process which disperses and attaches fine particles 2 for a mask on the whole surface of a polycrystalline silicon substrate 1, a process etching a region of the substrate 1 surface on which region the fine particles 2 do not attach, and a process which eliminates the fine particles 2 left on the substrate 1 surface. The fine particles 2 for a mask are dispersed and attached on the whole surface of the polycrystalline silicon substrate 1, and the surface is etched. Thereby the region of the substrate surface, on which region the fine particles 2 do not attach, is preferentially etched. When the fine particles left on the mask are eliminated, the parts on which the fine particles 2 have attached become protrusions, and the parts on which the particles have not attacked become recesses. Uniform unevenness is formed on the surface, so that a polycrystalline silicon substrate having low reflection factor can be produced.</p> |
