摘要 |
<p>PROBLEM TO BE SOLVED: To easily recognize unevenness of sputtering velocity within a raster forming region, simply correct unevenness, and easily correct misalignment of primary ion beams caused by difference between analytical regions. SOLUTION: A plurality of openings 1-5 are formed in a field aperture, and secondary ion count values are measured in each region. Or, without installing a plurality of openings in the field aperture, an analytical region on a scanning ion image is plurally divided, and similar procedure is applied. After that, the distribution in each region of the secondary ion counter values against sputtering time is compared, a beam shape is corrected, based on the compared result, and unevenness of sputtering velocity is corrected. The analytical region on the scanning ion image is plurally divided, the beam is moved according to the secondary ion count values in the divided region, and the irradiation misalignment of the beam is corrected.</p> |