发明名称 SUBSTRATE PROCESSING APPARATUS AND RECORDED MEDIUM STORING COMMUNICATION CONTROL PROGRAM
摘要 <p>PROBLEM TO BE SOLVED: To provide a substrate processing unit having a communication function of allowing the user to insert or delete a message stored upon a loss of communication with a computer and even if part of a record is damaged, it rarely affects other messages. SOLUTION: Upon a loss of communication with a host computer 30, a communication control module 210 of a main controller 20 stores a message to be sent to the host computer 30 in a spool table constituted by a database 240 via database management software 230. When the communication of the host computer 30 is restored, the message stored in the spool table is sent to the host computer 30.</p>
申请公布号 JP2000260675(A) 申请公布日期 2000.09.22
申请号 JP19990066235 申请日期 1999.03.12
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 KITAMOTO TORU;INOUE HIDEKAZU;YOSHIDA TAKUJI
分类号 H01L21/68;H01L21/02;(IPC1-7):H01L21/02 主分类号 H01L21/68
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