| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional shape measurement device for a die capable of easily and highly accurately measuring the three-dimensional shape and position of measurement objects composed of plural surfaces, especially individual dies in the case of combining the plural pieces of the dies. SOLUTION: In this three-dimensional shape measurement device for measuring the three-dimensional shape of the respective dies 4 by scanning the plural dies 4 (4a, 4b and 4c) as the measurement objects by a probe 10, at least three pieces of reference balls 2 (2a, 2b and 2c) are buried from the surface of a case body 1 to the inside and disposed to the case body 1 for holding the plural dies 4 (4a, 4b and 4c). Then, the surface shapes of the three pieces of the reference balls 2 and the plural dies 4 are respectively measured by the probe 10 and the respective shapes and position relation of the plural dies 4 are calculated from the center position data of the three pieces of the reference balls 2 and the surface shape measurement data of the plural dies 4. Thus, the respective shapes and positions of the dies 4 are easily and highly accurately measured.
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