CAPACITIVE FORCE MEASURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a capacitive force measuring apparatus which can measure a micro force stably with high sensitivity regardless of fluctuation in the temperature or humidity or aging. SOLUTION: A force acting on a probe 14 to the forward end at the resiliently deforming part of a sensor unit 11 bonded integrally with the resiliently deforming part 12 and the base part 13 with no intermediary of spacer is measured as a variation of capacity between electrodes provided on the opposite faces of the resiliently deforming part and the base part. These electrodes are connected with the resonance circuit of a high frequency oscillation circuit 22 and in order to measure the variation in the resonance frequency caused by the force, output signal from the high frequency oscillation circuit is measured over a specified time by means of a digital frequency counter 23.