| 摘要 |
PROBLEM TO BE SOLVED: To join a piezoelectric element to a fixing end main body with high accuracy, without lowering the efficiency of the piezoelectric element by metal- joining a joint part between the piezoelectric element and a main body for joining to the piezoelectric element, in a piezoelectric type device using the piezoelectric element. SOLUTION: First metal layers 5 are sputtered or vapor-deposited on a piezoelectric material 3 having an electrode 4 and a fixing end main body 1, respectively. Then second metal layers 6 are sputtered or vapor-deposited on the first metal layers 5 in the same manner, and a condition where a piezoelectric element side and a fixing end main body side have laminated structures comprising the first metal layer 5 and the second metal layer 6, respectively, is made. The second metal layers are made to adhere closely to each other so as to face each other, and pressure of about 3-10 Mpa is applied, and heat treatment of about 250 deg.C or above is performed, and the second metal layers are joined together caused by diffusing heat to each other. |
