| 摘要 |
PROBLEM TO BE SOLVED: To deter a multilayer film of a multilayer film reflecting mirror used in a soft X-ray range from exfoliating by forming an alternate multilayer film made of a substance with high refractive index and one with low refractive index only in a reflecting area of a substrate. SOLUTION: A notch 1c is formed in a part of a substrate 1, and a chamfered face 1b is made all around the outer periphery of a ground surface 1a. A film is formed only in the ground surface 1a of the substrate 1 by covering the notch 1c and the chamfered face 1b that are not covered with a holder 3 for fixing the substrate 1 with an adhesion preventing plate 4. On this occasion, a spacer 5 is inserted in order not to displace the substrate 1 in the holder 3. Then, an alternate multilayer film is formed on the ground surface 1a of the substrate 1 by putting it in a vacuum chamber of a film forming device and forming a film made of a substance with high refractive index and one with low refractive index. A multilayer film reflecting mirror where an alternate multilayer film is formed only in the ground face 1 can be obtained by taking out the substrate 1 from the inside of the vacuum chamber and detaching the holder 3, the spacer 5 and the adhesion preventing plate 4 after the formation of a film.
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