| 摘要 |
PROBLEM TO BE SOLVED: To easily and accurately measure the plane flatness of a large-sized planar body such as a surface plate used for a grinding device. SOLUTION: This device is provided with a measurement bar 30 arranged almost parallelly to a surface to be measured above the surface to be measured of the planar body such as the surface plate, a movable detector 32 supported freely movably in the longitudinal direction of the measurement bar 30, an interval measurement means 34 mounted to the movable detector 32 for detecting the separation interval of the movable detector 32 and the surface to be measured at the moving position of the movable detector 32 on the measurement bar 30, a laser beam light source 40 for emitting a laser beam in a fixed direction toward the movable detector 32 moved on the measurement bar 30 and a light receiving sensor 36 mounted to the movable detector 32 for receiving the laser beam emitted from the laser beam light source 40 and detecting the displacement amount of the height direction of the movable detector 32 from the reference height of the laser beam at the moving position of the movable detector 32 on the measurement bar 30.
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