发明名称 CONTACT MECHANISM
摘要 PROBLEM TO BE SOLVED: To provide a contact mechanism, exhibiting an appropriate function in vacuum. SOLUTION: Inside a container capable of retaining airtightness in vacuum, at least one contact 8 allowing electrically connection to a wire on a base board 14 arranged in the container from the container outside is included. The tip of the contact 8 is coated with a conductive and corrosion-resistant film, desirably coated with metal. A mechanism for mechanically cleaning the contact 8 tip and a mechanism for chemically or physically cleaning the contact 8 tip are provided. A mechanism coating the contact 8 tip with a corrosion- resistant and conductive film after cleaning is provided. The tip of the contact 8 can always be kept clean, by having these mechanisms installed.
申请公布号 JP2000260516(A) 申请公布日期 2000.09.22
申请号 JP19990063857 申请日期 1999.03.10
申请人 CANON INC 发明人 KUROKAWA TAKESHI;ARIGA TORU;MUROFUSHI YASUNOBU
分类号 G01R31/28;G01R1/06;H01J9/42;H01R13/03;(IPC1-7):H01R13/03 主分类号 G01R31/28
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