Microvalue assembly with micromechanically mfd. microvalve chip for 2/2 and 3/2 fluid flow control

摘要

The microvalve chip (181) is located in a housing section (194) with a fluid flow ports (182,186,196) such that the fluid flow through the ports is controllable by the microvalve. An isotropic electrically conductive elastomer seal (198) provides fluid tightness at the peripheral contact line between the housing section and the microwave chip. The seal is in electric contact with the microwave chip so as to enable application of actuating voltage to the microvalve.