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发明名称
Optische Nahfeldsonde und Verfahren zu ihrer Herstellung
摘要
申请公布号
DE59702188(D1)
申请公布日期
2000.09.21
申请号
DE19975002188
申请日期
1997.07.05
申请人
INSTITUT FUER MIKROTECHNIK MAINZ GMBH;OMICRON VAKUUMPHYSIK GMBH
发明人
GUETHNER, PETER;NOELL, WILFRIED;RUF, DR.;MAYR, KARSTEN
分类号
G02B21/00;(IPC1-7):G02B21/00
主分类号
G02B21/00
代理机构
代理人
主权项
地址
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