发明名称 OPTICAL MICRO CANTILEVER, METHOD OF MANUFACTURE THEREOF, AND MICRO CANTILEVER HOLDER
摘要 <p>A low-loss optical micro cantilever (10) comprises a support (1), an optical waveguide (2), an opaque film (3), a reflective film (4), a chip (5) with a pointed end, a minute opening (6) in the pointed of the chip (5), and a reflective mirror (7) for directing the light (H) from an optical input/output end (8) of the optical waveguide (2) toward the minute opening (6).</p>
申请公布号 WO2000055597(P1) 申请公布日期 2000.09.21
申请号 JP2000001361 申请日期 2000.03.06
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