发明名称 |
Semiconductor device production method, involves fastening protective layer at assembly mounting device with wafer edge removed from protective layer and wafer connected at side opposite to assembly mounting device |
摘要 |
The method involves fastening a protective layer at an assembly mounting device. A wafer edge is removed from the protective layer and the wafer is connected at a side opposite to the assembly mounting device. The protective layer is loosened and the wafer removed The wafer is divided along the wafer edge region by chip isolation. An Independent claim is included for a semiconductor device. |
申请公布号 |
DE10013067(A1) |
申请公布日期 |
2000.09.21 |
申请号 |
DE2000113067 |
申请日期 |
2000.03.17 |
申请人 |
DENSO CORP., KARIYA |
发明人 |
FUJII, TETSUO;FUKADA, TSUYOSHI;MUTO, HIROSHI;AO, KENICHI;YOSHIHARA, SHINJI;INOMATA, SUMITOMO |
分类号 |
B81C1/00;H01L21/301;H01L21/68 |
主分类号 |
B81C1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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