Electron-emitting device and method of manufacturing the same as well as electron source and image forming apparatus comprising such electron-emitting devices

摘要

A method of manufacturing an electron emitting device (104) of the type having, on a substrate 1, an electroconductive thin film (3) with an electron-emitting region (2), connected to respective electrodes (4,5). The electroconductive film (3) is formed by spraying through a nozzle (33;131) a solution containing component elements of the electroconductive thin film (3) which is to be formed. Spraying is performed whilst an electrical potential difference (V) is produced between the electrodes (4,5), between the nozzle (131) and the substrate (1), or both. The effect is to improve adherence of the film (3) to the substrate (1) or substrate and electrodes (1,4,5). This method may be extended to the manufacture of an electron source (1,102-104) having an array of electron-emitting devices (104). <IMAGE>