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发明名称
Ultrasonic cleaner and wet treatment nozzle comprising the same
摘要
申请公布号
EP1034850(A3)
申请公布日期
2000.09.20
申请号
EP20000301847
申请日期
2000.03.07
申请人
ALPS ELECTRIC CO., LTD.
发明人
ONO, SHOICHI;MITSUMORI, KENICHI;KASAMA, YASUHIKO;HAGA, NOBUAKI;SOEJIMA, JUNICHIRO;TAKAHASHI, NORIHISA;FUJIE, AKIO;IWASAKI, MINEO
分类号
B08B3/12;G02F1/13;H01L21/00;H01L21/304;(IPC1-7):B08B3/12;B08B3/02
主分类号
B08B3/12
代理机构
代理人
主权项
地址
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