Optical waveguide elements and a process for producing the same

摘要

A process for producing an optical waveguide element by thermally diffusing a metal element or a metallic compound into a substrate having a photoelectric effect, includes the steps of: forming a waveguide pattern on the substrate, said waveguide pattern comprising the metal element or the metallic compound; forming a film on a main plane of the substrate and covering the entire waveguide pattern, the film having an electro-optic effect; and effecting the thermal diffusion of the metallic element and the metallic compound. <IMAGE>