FILTER UNIT FOR INTEGRATED GAS PANEL

摘要

PROBLEM TO BE SOLVED: To provide a filter unit for an integrated gas panel in which gas is not accumulated at the upper part of a space part of an element space part or at the upper part of a main body space part, and good in gas substituting characteristic and excellent in filtering performance. SOLUTION: A top cover 7 having a cylindrical body part 5 where a gas flow passage 20 is formed and which penetrates a cylindrical hollow part 17 of a filter element 4 housed in a filter unit main body 3 so as to form an element space part 21 and a cap part 6 for plugging a filter housing part 2 is provided, a gas inlet 10 and the lower part of the gas flow passage 20 of the cylindrical main body part 5 communicate, the gas flow passage 20 and a main body space part 21 communicate with plural gas dispersion flow passage 24 provided radially in the top cover 7 so that the upper part of the gas flow passage 20 and the upper part of the main body space part 18 communicate.