| 摘要 |
PROBLEM TO BE SOLVED: To shorten time required for a cleaning operation by making a cleaning liquid stored in a cleaning liquid tank flow as a rapid flow into a closed space formed of a cleaning jig and an article to be cleaned, and at the same time, making a reflux of the cleaning liquid flowing out of the closed space into the cleaning liquid tank by a pump. SOLUTION: A cleaning jig 112 is arranged inside a cleaning chamber 110 at the upper part of a cleaning device 100, and an article 114 to be cleaned is attached to the cleaning jig 112 to clean the specified region of the article 114. The cleaning region of the article 114 faces the interior of the closed space formed between the article 114 and the cleaning jig 112. A cleaning liquid inside a rough-cleaning liquid tank 120A is made to flow into the interior of the cleaning jig 112 from piping P-in on the inflow side by opening a valve 126A and a valve 127A and actuating a pump 122A. The cleaning liquid is made to flow out of piping P-out on the outflow side into the rough-cleaning liquid tank 120A to clean the cleaning region of the article 114.
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