发明名称 Wire bonding apparatus
摘要 A wire bonding method and apparatus using a computer that has a memory which stores correction values that correct positional discrepancies in the height position of a bonding arm and limit values that limit an electric power not only in a state in which no load is applied but also in a state in which a weight is mounted on a supporting frame so that a load equal to a bonding load is applied to a linear motor that raises and lowers the bonding arm.
申请公布号 US6119914(A) 申请公布日期 2000.09.19
申请号 US19990343568 申请日期 1999.06.30
申请人 KABUSHIKI KAISHA SHINKAWA 发明人 TAKAHASHI, KUNIYUKI;HAYASHI, HIJIRI
分类号 H01L21/60;B23K20/00;B23K20/10;(IPC1-7):B23K1/06;B23K5/20;B23K37/00;B23K31/12 主分类号 H01L21/60
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