Optical deflector comprising a movable member having a high rigidity and a reduced moment of inertia and a method for producing the same

摘要

An optical deflector has a supporter. A movable plate has a mirror face for reflecting light. At least one elastic member is provided for connecting the movable plate and the supporter and holding the movable plate so that the movable plate can deflect. A driving coil is formed in a ring form on the movable plate in such a manner that the driving coil passes near a movable end of the movable plate when the movable plate deflection-moves. A magnet and a magnetic yoke generate a closed magnetic circuit for applying a magnetic field to the driving coil in the direction substantially parallel to the plane of the movable plate. The magnet or the magnetic yoke generating the closed magnetic circuit is arranged at a position opposite to the movable end of the movable plate outside the driving coil, and at a position near the movable plate inside the driving coil to form a magnetic gap.