发明名称 |
Bonding of aluminum oxide components to silicon substrates |
摘要 |
The invention is a method and resulting device which provides a strong bond between a silicon substrate and an oxide component mounted within a cavity in the substrate. A layer of titanium, for example, is deposited on the walls of the cavity, followed by deposition of a layer of aluminum. The structure is preferably annealed to form titanium silicide and titanium-aluminum interface layers. The component is then bonded to the aluminum layer.
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申请公布号 |
US6119921(A) |
申请公布日期 |
2000.09.19 |
申请号 |
US19990252729 |
申请日期 |
1999.02.19 |
申请人 |
LUCENT TECHNOLOGIES |
发明人 |
BRADY, MICHAEL FRANCIS;DAUTARTAS, MINDAUGAS FERNAND;DORMER, JAMES F.;MERCHANT, SAILESH MANSINH;NIJANDER, CASIMIR ROMAN;OSENBACH, JOHN WILLIAM |
分类号 |
G02B6/42;(IPC1-7):B23K31/00;B23K101/40;G02B13/18 |
主分类号 |
G02B6/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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