摘要 |
PROBLEM TO BE SOLVED: To form a uniform film form or granular form or a mixed state thereof by forming metal carbonyl through carbon monoxide in metallic superfine particles, vaporizing the metal carbonyl, supplying the same to a reaction furnace and causing the pyrolysis thereof. SOLUTION: The metal carbonyl is formed through the carbon monoxide at the metallic superfine particles having an average grain size of <=50 nm and is vaporized. The vaporized metal carbonyl is then supplied to the reaction furnace to cause the pyrolysis of the metal carbonyl, by which the surface of the inorganic matter is decorated with the metal or metal oxide. The excess metal carbonyl is decomposed and discharged. The metal which is the starting raw material of the metal carbonyl is not particularly restricted, insofar as such metal forms the metal carbonyl. The metal includes, for example, nickel, iron, cobalt, or the like. The temperature in the reaction furnace is preferably kept at about 50 to 150 deg.C so as not to solidify the metal carbonyl. The inorganic matter may be decorated with the metal or metal oxide by pyrolyzing the vaporized metal carbonyl.
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