发明名称 Thin-film transistor array and method for manufacturing same
摘要 A high-quality thin-film transistor array. The gate insulating film below the pixel electrode is etched off in its entirely or along a slit extending along a drain bus line in order to simultaneously remove the residual a-Si produced due to defective patterning. The insulating film is interposed between a drain bus line and a pixel electrode to form a boundary separating layer therebetween. The reject ratio is suppressed by reducing the occurrence of point defects of semi-bright spots, ascribable to capacitative coupling to the pixel electrodes as a result of interconnection of the residual a-Si produced by defective patterning to the drain bus line.
申请公布号 US6121632(A) 申请公布日期 2000.09.19
申请号 US19980092944 申请日期 1998.06.08
申请人 NEC CORPORATION 发明人 TAGUCHI, NAOYUKI;OHI, SUSUMU
分类号 G02F1/1343;G02F1/136;G02F1/1368;H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L29/786;(IPC1-7):H01L29/00 主分类号 G02F1/1343
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