发明名称 Vaporizer boat for metal vaporizing
摘要 The invention concerns a resistance-heated vaporizer boat for vaporizing metal. According to the invention, a reduced temperature is generated in the edge region, i.e., along the longitudinal edge of the vaporizer boat, such that there is only a very slight wetting tendency along this longitudinal edge. Consequently, the melt can be localized such that it cannot overflow over the longitudinal edges of the vaporizer boat, without a cavity necessarily having to be provided in the vaporization surface of the vaporizer boat. As a result, optimum wetting and constantly targeted vaporization of the metal upwards towards the area to be vapor-deposited are attained.
申请公布号 US6120286(A) 申请公布日期 2000.09.19
申请号 US19980093269 申请日期 1998.06.08
申请人 SINTEC KERAMIK GMBH & CO. KG 发明人 GOETZ, ULRICH
分类号 C23C14/24;(IPC1-7):C21D9/00 主分类号 C23C14/24
代理机构 代理人
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