| 发明名称 |
Brush assembly apparatus |
| 摘要 |
A semiconductor processing system, such as a system for scrubbing both sides of a wafer at the same time, that includes a brush box containment apparatus for use with highly-acidic or other volatile chemical solutions, a roller positioning apparatus and a (brush) placement device.
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| 申请公布号 |
US6119295(A) |
申请公布日期 |
2000.09.19 |
| 申请号 |
US19990285356 |
申请日期 |
1999.04.02 |
| 申请人 |
LAM RESEARCH CORPORATION |
发明人 |
GOCKEL, THOMAS R.;OLSON, LORIN;RYLE, LYNN;WHITELAW, BRETT A. |
| 分类号 |
H01L21/304;A46B13/02;B08B1/04;B24B29/02;B24B37/04;H01L21/00;(IPC1-7):A46B13/02;B08B11/00;B08B13/00 |
主分类号 |
H01L21/304 |
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