| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain excellent mold releasability and surface properties by incorporating a coating layer containing wax in at least one surface of a base film, and setting a water droplet contact angle of the surface of the coating layer to a specific value or above. SOLUTION: A coating layer containing wax is incorporated in at least one surface of a base film, a water droplet contact angle of the surface of the coating layer is set to about 80 deg. or above. As the wax, natural wax such as a vegetable wax, an animal wax, a mineral wax, a petroleum wax or the like, or a synthetic wave such as a synthetic hydrocarbon, modified wax, hydrogenated wax or the like is used, among them a polyolefinic compound is preferable. If the angle of the surface of the layer is less than about 80 deg., the releasability is lowered, and hence in the case of releasing, a photoresist surface is easily damaged and not preferable.</p> |
