发明名称 Operating system for fabrication apparatus
摘要 By dividing a range within which a control device can be operated into a plurality of hierarchical operating levels corresponding to levels of different users of that control device, and inputting information such as the name and password of each of these users, the present invention makes it possible to set an operating level corresponding to each of these users. Once an operating level is set, an operating portion is configured to disable the operation of the control device in an operating range that exceeds this operating level. The configuration is such that switch portions of the operating panel are allocated to a certain operating level, but switch portions relating to operating levels other than the currently set operating level are disabled.
申请公布号 US6122556(A) 申请公布日期 2000.09.19
申请号 US19960603591 申请日期 1996.02.16
申请人 TOKYO ELECTRON LIMITED 发明人 TOCHIORI, SATOSHI;KUMASAKA, IWAO;SHIMATANI, HIROSHI;TAKASHIMA, TOSHIHIRO
分类号 H01L21/02;G05B9/02;G05B15/02;G05B19/409;G05B23/02;(IPC1-7):G05B11/01 主分类号 H01L21/02
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