THIN FILM THERMAL HEAD, FABRICATION THEREOF AND IMAGING DEVICE EMPLOYING IT

摘要

PROBLEM TO BE SOLVED: To enhance print image quality by suppressing fluctuation of frictional resistance due to difference of print rate. SOLUTION: At least a resistive heating layer 43 and a conductor layer 44 are laminated sequentially on a substrate 41 and then etched to form a plurality of heating elements 40 which are then coated, including the gaps between them, with a protective layer 45 to constitute a thin film thermal head wherein the upper surface of the protective layer 45 between the heating elements 40 is formed lower by 0.3μm or more than the upper surface of the protective layer 45 on the heating elements 40. The thermal head is produced by partially removing the conductor layer 44 and the resistive heating layer 43 by etching to form a plurality of heating elements 40 and then removing the underlying layer of the resistive heating layer 43 exposed between the heating elements 40 by etching.