| 摘要 |
PROBLEM TO BE SOLVED: To provide a target capable of securing an excellent grade of joining between a target member and a backing plate, and its manufacturing method. SOLUTION: A high temperature brazing filler metal 2 is disposed on the surface, to be opposed to a backing plate 4, of a target member 1 and the high temperature brazing filler metal is solidified, and then, a low temperature brazing filler metal 3 having a melting point lower than that of the high temperature brazing filler metal is disposed on the high temperature brazing filler metal at a temperature where the high temperature brazing filler metal does not completely become molten. On the other hand, a low temperature brazing filler metal having a melting point lower than that of the high temperature brazing filler metal is disposed on the surface, to be opposed to the target member, of the backing plate. Subsequently, the target member and the backing plate are joined. By this method, the target, having a new structure in which the target member and the backing plate are joined via the brazing filler metals and the high temperature brazing filler metal and the low temperature brazing filler metal having a melting point than that of the high temperature brazing filler metal are disposed in the order from the target member side, can be obtained.
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