发明名称 EVACUATION CONTROL DEVICE
摘要 PROBLEM TO BE SOLVED: To prevent malfunction in an evacuation system in the case where noise caused by discharge and the like is invaded in an evacuation control device by memorizing an operation data of the evacuation system in a plurality of latch circuit, and carrying out sequence control on the basis of a data which is memorized while matching many latch circuits. SOLUTION: An operation data of an evacuation system is inputted into a plurality of latch circuits 2 to 4 passing a buffer 1, and a data is memorized with a timing outputted by a latch timing output circuit 5. Each output data of the latch circuits 2 to 4 is inputted to a majority circuit 6, a data shown while matching a majority is judged as a correct data, and is outputted to a control circuit 8 to sequence-control the evacuation system. An exclusion logical sum of an output data of the majority circuit 6 and an individual output data of each latch circuit 2 to 4 is detected by a disagreement data detecting circuit 7. In the case where both data are not matched, an error of a memorized data is judged, and the error is outputted.
申请公布号 JP2000257565(A) 申请公布日期 2000.09.19
申请号 JP19990058796 申请日期 1999.03.05
申请人 JEOL LTD 发明人 WAKASA TAKESHI
分类号 H01J49/24;F04B49/00;(IPC1-7):F04B49/00 主分类号 H01J49/24
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