发明名称 |
Förfarande för etsning, samt ramelement, mask och prefabricerat substratelement för användning vid sådan etsning |
摘要 |
A resist coating is applied on the metal film (3) formed on the substrate (1). The central circuit portion (4) of the substrate is etched electrochemically in a specified pattern to form individual circuits (5). A frame (9) is mounted on the substrate before etching such that it is adjacent to the central portion to attract the electrical field and prevent excessive densities at the periphery of the central portion during etching. Independent claims are also included for the following: (a) Frame element; (b) Mask; (c) Prefabricated substrate element |
申请公布号 |
SE0003326(D0) |
申请公布日期 |
2000.09.19 |
申请号 |
SE20000003326 |
申请日期 |
2000.09.19 |
申请人 |
OBDUCAT AB |
发明人 |
PER *PETERSSON;MIKAEL *GUSTAVSSON;JENNY *SJOEBERG;BIN *XIE;BJARNI *BJARNASON;GUST *BIERINGS;GOERAN *FRENNESSON |
分类号 |
C25F;C25F3/02;C25F3/14;H01L21/3063;H01L21/308;H05K3/07;(IPC1-7):C25F/ |
主分类号 |
C25F |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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