| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro filter which is formed from a fiber-sheet laminate and used for filtering a liquid and also has both sufficient metal-ion capturing capability and sufficient fine-particle capturing capability for the application to semiconductor manufacture and also to provide such a micro filter having excellent chemical resistance. SOLUTION: This micro filter has within it, a laminate formed by laminating at least one fiber sheet layer having metal-ion capturing capability and at least one microporous filtration film layer to each other, wherein the microporous filtration film preferably has 0.02-0.2μm pore size, the cation exchange capacity of the fiber sheet is preferably >=0.2 meq/g, and each of the microporous filtration film and the base material of the fiber sheet preferably consists of any one of polysulfone, polyethersulfone and polyphenylenesulfone.
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