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发明名称
摘要
申请公布号	JP2000512336(A)	申请公布日期	2000.09.19
申请号	JP19980546557	申请日期	1998.04.21
申请人		发明人
分类号	G03F7/11;C08F8/00;C08F8/30;G03F7/09;H01L21/027;(IPC1-7):C08F8/30	主分类号	G03F7/11
代理机构		代理人
主权项
地址

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