发明名称 Methods of fabricating flat panel evacuated displays
摘要 In one aspect, the invention includes a method of fabricating a flat panel evacuated display. An oxidizable material layer is formed over a substrate upper surface. The oxidizable material has an upper surface and is provided as a plurality of separate discrete elements. A layer of sacrificial material is formed over the oxidizable material upper surface and over intervening regions of the substrate between the separate discrete elements. The sacrificial material is selectively removable relative to the oxidizable material. The layer of sacrificial material is planarized to remove the sacrificial material from over the oxidizable material upper surface. A plurality of spacers are bonded to the oxidizable material upper surface. The sacrificial material is removed from between the separate discrete elements.
申请公布号 US6120339(A) 申请公布日期 2000.09.19
申请号 US19990453848 申请日期 1999.12.01
申请人 MICRON TECHNOLOGY, INC. 发明人 ALWAN, JAMES J.
分类号 H01J9/18;H01J9/24;(IPC1-7):H01J9/24 主分类号 H01J9/18
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