| 摘要 |
PROBLEM TO BE SOLVED: To provide a low thermal expansion Fe-Ni or Fe-Ni-Co alloy sheet excellent in adhesion of resist and also to provide electronic parts using the sheet. SOLUTION: The sheet is a low thermal expansion Fe-Ni alloy sheet containing 30-50 wt.% Ni or a low thermal expansion Fe-Ni-Co alloy sheet containing 26-38 wt.% Ni and 1-20 wt.% Co. A surface layer containing hydroxide together with oxide is formed. With respect to the surface layer, the ratio of oxygen in the state of hydroxide to oxygen in the state of oxide is regulated to >=0.4; or, with respect to the surface layer, the ratio of Ni in the state of oxide and hydroxide to Fe in the state of oxide and hydroxide is regulated to >=0.5.
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