| 摘要 |
PROBLEM TO BE SOLVED: To obtain the information of the shape of a surface and an internal structure at the same time by imaging the ultrasonic waves generated by irradiating a beam intermittently for every pixel, overlapping the image on the already obtained secondary electron image and displaying the information of the surface of a sample and the internal structure. SOLUTION: The irradiated ion species ionized in an ion source 1 are made parallel at a capacitor lens 2 and thereafter converged with an objective lens 4. The upper part of a sample 7 is digitally scanned in accordance with the signal from a scanning signal forming device 11 by a scanning deflection coil 5. The signal of the electrons generated in scanning is processed and sent into a CPU 13. In the meantime, The sample 7 is intermittently irradiated by ions by inputting the signal from a pulse generator 10 into an ion-beam contact breaker 9 at each step of the scanning of the ion species. The generated ultrasonic waves are detected by a PZT 8 and sent into the CPU 13. The obtained scanning secondary electron image and the ultrasonic signal image are overlapped and imaged and displayed on a CRT 14. |
