RETICLE THAT COMPENSATES FOR LENS ERROR IN PHOTOLITHOGRAPHIC SYSTEM

摘要

PURPOSE: A reticle (130) which gives an image pattern and compensates for a lens error in a photolithographic system is provided, to improve the accuracy of photolithographic systems such as step and repeat systems. CONSTITUTION: A reticle is structurally modified using image displacement data indicative of the lens error. The reticle can be structurally modified by adjusting the configuration (or layout) of radiation-transmitting regions (132,134) for instance by adjusting a chrome pattern on the top surface of a quartz base. Alternatively, the reticle can be structurally modified by adjusting the curvature of the reticle, for instance by providing a chrome pattern on the top surface of a quartz base and grinding away portions of the bottom surface of the quartz base. The image displacement data can also vary as a function of lens heating so that the reticle compensates for lens heating associated with the reticle pattern.