A MASK USED FORMING A LAMINATED LAYER STRUCTURE,A MANUFACTURING METHOD THEREOF, AND AN UTILIZING METHOD THEREOF

摘要

The present invention mask 1 has a mask-portion 12. The mask-portion 12 comprises: a bed sheet layer 12c made of paper or resin; and an irradiation-resistant layer 12e made of metal and coated on the irradiation side of the bed sheet layer 12c. The irradiation-resistant layer 12e has durability with respect to the emitted energy such as laser beam than the bed sheet layer 12c.