APPARATUS FOR FIXING WAFER

摘要

PURPOSE: An apparatus for fixing a wafer is provided to rapidly fix and separate the wafer, and to prevent a foreign substance from being induced in fixing the wafer, by fixing the wafer by a clamp when the wafer is mounted on the inside of a process chamber. CONSTITUTION: In an apparatus for fixing a wafer(3) on an upper surface of a jig plate(1) mounted on a robot arm in a process chamber, a plurality of fixing elements and clamps are established in the jig plate. The fixing element adheres/separates the wafer to/from an adhesion pad(2), in which the wafer is mounted on the jig plate by intervening the adhesion pad. In the clamp, a rotating plate(8) connected to a side of a operating handle(10) is built in a supporting plate(5) to rotate the fixing element.