| 摘要 |
PURPOSE: A chamber including a temperature sensor is provided to prevent a hunting phenomenon of a measured temperature value and corrosion the equipment, thereby exactly measuring a temperature. CONSTITUTION: A chamber equipment including a temperature sensor comprises a process chamber(100), an anode portion(200) disposed in the process chamber and receiving a RF power, and a temperature sensor(300) for detecting a temperature of the anode. The temperature sensor is a laser sensor, which irradiates a laser to the anode portion and detects the laser reflected from the anode portion to measure a temperature of the anode. A matching box(400) is disposed at a lower portion of the process chamber to construct a TCP(transformer coupled plasma) equipment. A matcher(450) for applying RF power to the anode portion is disposed in the matching box. Since the temperature sensor is mounted on a bottom portion or a side wall of the matching box, the temperature sensor is not directly contacted with the anode portion.
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