| 摘要 |
PURPOSE: An apparatus for removing impurity of an optical mask is to remove an organic particle attached on an optical mask using an electrostatic force without applying a mechanical stress. CONSTITUTION: An apparatus(100) for removing impurity of an optical mask comprises: a driving unit including a first driving shaft(112), a first driving motor(114), a second driving shaft(122) and a second driving motor(124); an electrostatic charge medium plate(110) rotated by a driving force of the driving unit, for generating an electrostatic force to remove an organic particle attached on an optical mask; and an electrostatic induction medium plate(120) established rotatively in the opposite direction to the rotation direction of the electrostatic charge medium plate on the electrostatic charge medium plate, for inducing the electrostatic force to the electrostatic charge medium plate. The electrostatic charge medium plate has a circular shape and has a larger diameter than the electrostatic induction medium plate.
|
