| 摘要 |
<p>PURPOSE: Provided is a fluid control valve, and a fluid supply/exhaust system, in which a member which is made unitary with a rod shaped shaft which applies pressure to a valve holder is moved upwardly and downwardly by a coil using electromagnetic induction, and thereby, the portion between the valve seat and the valve holder is opened and closed. The fluid control valve and fluid supply/exhaust system of the present invention is chiefly used in semiconductor manufacturing apparatuses. CONSTITUTION: A fluid control valve, which can control a fluid having a pressure in the order of 10 kg/cm¬2, has a response time in the order of several milliseconds and can be made small in size, and a fluid supply/exhaust system that provides less gas counterflow in the event of a plurality of valves being used. A fluid control valve of the invention controls a fluid moving (a) in a valve body by closing and opening a portion between a valve seat and a valve holder by means of a drive unit. The drive unit comprises a rod-shaped shaft for application of pressure through the valve seat and the valve holder, and a member (a) fixed around the rod-shaped shaft. The member (a) is made from a magnetic material, and has a space between it and the shaft. A coil provided in parallel to the shaft moves the member (a) up and down by electromagnetic induction, and makes use of a spring force to close and open a portion between the valve seat and the valve holder.</p> |
