MICROMECHANICAL SENSOR

摘要

PURPOSE: A micromechanical sensor is provided which can simply produce and connect with an electronic selection circuit. CONSTITUTION: A relative pressure sensor or a miniaturized microphone are designed as micromechanical components with a polysilicon membrane (5) arranged over a body silicon layer (3) of an SOI-substrate. A recess (9) shaped at the back side of the substrate communicates through openings (10) in the body silicon layer with the cavity (6) located between the membrane and the body silicon layer. When the membrane vibrates, the pressure in the cavity can be compensated through the openings. Measurement is carried out capacitively by an electric connection (12, 13) between the electroconductive doped membrane and a doped area (8) of the body silicon layer.