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发明名称
WÄRMEBEHANDLUNG EINER HALBLEITERSCHEIBE
摘要
申请公布号
AT195611(T)
申请公布日期
2000.09.15
申请号
AT19930913582T
申请日期
1993.06.25
申请人
SUMITOMO METAL INDUSTRIES, LTD.
发明人
HORAI, MASATAKA;ADACHI, NAOSHI;NISHIKAWA, HIDESHI;SANO, MASAKAZU
分类号
H01L21/02;H01L21/205;H01L21/30;H01L21/322;H01L21/324;(IPC1-7):H01L21/324
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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