| 摘要 |
PURPOSE: A method for discharging/charging gases in plasma, display and panel is provided to heat/cool the panel equally. CONSTITUTION: In a method for discharging/charging gases in plasma, display and panel, a plurality of attached panels for chipduct sealed in a body (W) are maintained in an exhaust cart (10) vertically and remotedly at regular intervals. In each chipduct (Wa) a vacuum exhaust system and a discharge gas supplying system are connected switchable, so to locate the plurality of the attached panels for chipduct sealed in a body (W) in a furnace. While a circulating air passing through spaces of the plurality of the attached panels for chipduct sealed in a body (W), the air is heated or cooled for exhausting process. After the exhausting process discharged gases are supplied for each panel, and then each chipduct (W) is sealed. |
