MEASURING METHOD AND APPARATUS FOR WATERSOLUBLE CONTAMINANTS IN THE AIR IN CLEAN ROOM

摘要

PURPOSE: An apparatus and a method of analyzing pollutant in a clean room are to condense air within the clean room and to analyze simultaneously the various pollutant within the condensed droplet. CONSTITUTION: The apparatus comprises a sample air inspirator(21), a flow control valve(22), a condenser(23) and a booster pump(24). The sample air inspirator has a motor and an impeller. The flow control valve is a commercial MFC(mass flow controller). The flow control valve controls amount of the sample air to be introduced to the condenser. The sample air in a clean room is condensed to form a droplet. The droplet is pressed and provided to an analyzer(25) by the booster pump. The analyzer is an ion-exchange typed chromatography. By the analyzer, a water-soluble pollutant within the air in the clean room is detected. Between the sample air inspirator and the condenser, a path selection valve is provided.