| 摘要 |
Center-to-center spacings (L1, L2, L3, L4, . . . ) of adjacent holes (5) in a hole chain (6) are set to values not less than five times a Blech length. This setting causes two parameters (MTF and sigma ) of a logarithmic normal distribution used as a failure distribution for EM lifetime prediction to be constant independently of the center-to-center spacings, permitting stable EM lifetime prediction of the hole chain. Further, setting the length of each of extension interconnect wires (2) to a value not greater than the Blech length prevents voids from being created in the extension interconnect wires (2). |
