SYSTEM FOR DETECTING DOCKING STATE OF PERSONAL GUIDED VEHICLE IN WAFER CARRIER TRANSFERRING SYSTEM AND CONTROL METHOD THEREOF

摘要

PURPOSE: A system for detecting a docking state of a personal guided vehicle in a wafer carrier transferring system is provided to have the personal guided vehicle precisely docked to a loadport of an apparatus for manufacturing a semiconductor and to display the docking state. CONSTITUTION: A system for detecting a docking state of a personal guided vehicle in a wafer carrier transferring system comprises an automated material handling system(100), a personal guided vehicle(104), a docking apparatus(110), a loadport(106), and an apparatus(102) for manufacturing a semiconductor. The automated material handling system has the wafer carrier rested in the loadport and is controlled by a host computer. The personal guided vehicle is transferred by an operator, on which the wafer carrier is mounted. The docking apparatus has a plurality of detecting elements for detecting a docking state and an undocking state of the personal guided vehicle, connected to a port of the personal guided vehicle. The loadport receives the wafer carrier from the personal guided vehicle, connected to the docking apparatus. The apparatus for manufacturing a semiconductor displays the docking state and a state capable of docking of the personal guided vehicle by detection signal of docking and undocking state from the detecting elements and controls to transfer the wafer carrier from the automated material handling system according to the docking state of the personal guided vehicle.