发明名称 |
COOLING DEVICE USED IN X-RAY TUBE |
摘要 |
PROBLEM TO BE SOLVED: To provide a cooling device for a target substrate which eliminates thermal damages occurring in a target substrate of an X-ray tube. SOLUTION: This cooling device used in an X-ray tube, equipped with a target plate cools a reverse side 3 of the target 1 subjected to incidence of an electron beam 9 by cooling water 7 wherein a cooling water channel 6 is formed along the reverse side 3 and a separator 4 is installed over the reverse side 3 of the target 1 and is equipped with a vaporized jet intake 5 which opens above the reverse side 3 of the target area is made incident with the electron beam 9, so that a bubble 8 produced by the vaporized jet is discharged together with the cooling water 7 supplied through the cooling channel 6 out of the vaporized jet intake 5 into the inside of the separator 4.
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申请公布号 |
JP2000251811(A) |
申请公布日期 |
2000.09.14 |
申请号 |
JP19990054419 |
申请日期 |
1999.03.02 |
申请人 |
RIGAKU CORP |
发明人 |
OSAKA NAOHISA;HARADA JINPEI;KURIBAYASHI MASARU |
分类号 |
H01J35/12;(IPC1-7):H01J35/12 |
主分类号 |
H01J35/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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